JPH0449675B2 - - Google Patents

Info

Publication number
JPH0449675B2
JPH0449675B2 JP58178939A JP17893983A JPH0449675B2 JP H0449675 B2 JPH0449675 B2 JP H0449675B2 JP 58178939 A JP58178939 A JP 58178939A JP 17893983 A JP17893983 A JP 17893983A JP H0449675 B2 JPH0449675 B2 JP H0449675B2
Authority
JP
Japan
Prior art keywords
stage
piezoelectric element
fine movement
axis
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58178939A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6069593A (ja
Inventor
Sadao Sugyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP17893983A priority Critical patent/JPS6069593A/ja
Publication of JPS6069593A publication Critical patent/JPS6069593A/ja
Publication of JPH0449675B2 publication Critical patent/JPH0449675B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP17893983A 1983-09-26 1983-09-26 微動ステ−ジ機構 Granted JPS6069593A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17893983A JPS6069593A (ja) 1983-09-26 1983-09-26 微動ステ−ジ機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17893983A JPS6069593A (ja) 1983-09-26 1983-09-26 微動ステ−ジ機構

Publications (2)

Publication Number Publication Date
JPS6069593A JPS6069593A (ja) 1985-04-20
JPH0449675B2 true JPH0449675B2 (en]) 1992-08-12

Family

ID=16057281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17893983A Granted JPS6069593A (ja) 1983-09-26 1983-09-26 微動ステ−ジ機構

Country Status (1)

Country Link
JP (1) JPS6069593A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3610540A1 (de) * 1986-03-27 1987-10-01 Kernforschungsanlage Juelich Bewegungseinrichtung zur mikrobewegung von objekten
JPS6382389A (ja) * 1986-09-26 1988-04-13 新技術事業団 試料微動機構
JPH0769443B2 (ja) * 1987-02-06 1995-07-31 株式会社日立製作所 ６自由度微動装置
JPS6454393A (en) * 1987-08-26 1989-03-01 Nec Corp Flap stage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817616A (ja) * 1981-07-24 1983-02-01 Nippon Telegr & Teleph Corp <Ntt> 移動ステ−ジ
JPS5831404U (ja) * 1981-08-26 1983-03-01 東芝機械株式会社 Ｎ段式空圧シリンダ

Also Published As

Publication number Publication date
JPS6069593A (ja) 1985-04-20

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